High density plasma dlc
WebAbstract: Diamond-like carbon (DLC) films were grown on Si substrates by high-density helicon wave plasma (HWP) generated under low pressure, with the help of CH 4 as an important single-source precursor. The influence of magnetic field (B 0: 1200-2400 Gs) on the film structure, morphology, composition, and mechanical properties has been … Web29 de out. de 2024 · Hydrogen-free diamond-like carbon (DLC) thin films are attractive for a wide range of industrial applications. One of the challenges related to the use of hard DLC lies in the high intrinsic compressive stresses that limit the film adhesion. Here, we report on the mechanical and tribological properties of DLC films deposited by High Power …
High density plasma dlc
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Weba microwave-excited high-density near plasma gave a considerably high deposition rate of 188 µm/h, which is about 180 times larger than that of conventional method, together with a hardness of 12 GPa in DLC coating [3]. In this work, in order to understand the characteristics of DLC deposited at over 100 µm/h, DLCs obtaiend by using DC plasma ... Web1 de jan. de 2015 · In the previous study [10], new plasma technology was utilized to develop the polishing process of CVD diamond films on the basis of our developing high-density oxygen plasma ashing systems [11 ...
Webwaves traveling along the surface boundaries of plasma and dielectric, can provide a … WebTherefore a high-density DLC (HD-DLC) film with its hydrogen content reduced to the greatest extent possible by keeping the fraction of sp3 bonds in a film ... prepared for comparison using the plasma CVD method [8]. The film thickness of conventional DLC is 410 nm, and HD-DLC is 50 nm. 1 These were measured by
WebIntroduction. Diamond-like-carbon (DLC) thin films such as a-C and a-C : H have … WebAbstract: Diamond-like carbon (DLC) has been widely utilized in industries; e.g., the protective coating of punches and dies. The high-density plasma oxidation was used to make selective removal of the DLC films and to construct the three-dimensional micro-texture on the SKD11.
Web3.1.4.2 A source of small-scale irregularities and radar backscatter. Plasma density …
Web20 de abr. de 2001 · Operation regimes, plasma parameters, and applications of the low-frequency (∼500 kHz) inductively coupled plasma (ICP) sources with a planar external coil are investigated. It is shown that highly uniform, high-density (n e ∼9×10 12 cm −3) plasmas can be produced in low-pressure argon discharges with moderate rf powers. … flight trailer 2021Web1 de jan. de 2000 · HIGH-DENSITY PLASMA SOURCES relatively modest. One can … great east thompson train wreckWeb1 de abr. de 2000 · Abstract. This paper will present physical and tribological properties of … great east title keene nhgreat east thompson train wreck of 1891Web2016. Hoffmann, Sabine, Eleanor S Lee, Andrew McNeil, Luis L Fernandes, Dragan Vidanovic, and Anothai Thanachareonkit. "Balancing daylight, glare, and energy-efficiency goals: An evaluation of exterior coplanar shading systems using complex fenestration modeling tools ." Energy and Buildings 112 (2016) 279-298. great east titleWeb17 de jun. de 2013 · In this paper, ultrahigh-speed deposition of diamond-like carbon (DLC) at deposition rates over 100 m/h is investigated. DLC coatings to steel substrates are conducted by using a plasma CVD apparatus employing new-type high-density plasma, which is sustained by microwaves propagating as surface waves along plasma–sheath … great east title company maineWebDischarges for processes. A plasma is any gas in which a significant percentage of the atoms or molecules are ionized. Fractional ionization in plasmas used for deposition and related materials processing varies … great east title bangor maine